US 11,988,302 B2
Fluid control device, abnormality detection method of fluid control device, abnormality detection device, and abnormality detection system
Ryutaro Tanno, Osaka (JP); Tsutomu Shinohara, Osaka (JP); Yuya Suzuki, Osaka (JP); and Hidenori Kiso, Osaka (JP)
Assigned to FUJIKIN INCORPORATED, Osaka (JP)
Appl. No. 17/264,879
Filed by Fujikin Incorporated, Osaka (JP)
PCT Filed Jul. 16, 2019, PCT No. PCT/JP2019/027962
§ 371(c)(1), (2) Date Feb. 1, 2021,
PCT Pub. No. WO2020/031628, PCT Pub. Date Feb. 13, 2020.
Claims priority of application No. 2018-151587 (JP), filed on Aug. 10, 2018.
Prior Publication US 2021/0302264 A1, Sep. 30, 2021
Int. Cl. F16K 37/00 (2006.01); F16K 7/14 (2006.01); F16K 31/126 (2006.01); G01M 3/28 (2006.01)
CPC F16K 37/005 (2013.01) [F16K 7/14 (2013.01); F16K 31/1262 (2013.01); F16K 31/1266 (2013.01); G01M 3/2876 (2013.01); G01M 3/2815 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A fluid control device having a flow path and a closed space that is isolated from the flow path by an isolation member configured to change in form or positioning, responsive to opening/closing operations of an actuator member, while isolating the closed space from the flow path, between an open state that opens the flow path and a closed state that closes the flow path, and the flow device having a capability of detecting an abnormality of the fluid control device, comprising:
an opening/closing mechanism configured to selectively cause the opening/closing operations of the actuator member;
a pressure sensor configured to detect a pressure inside of the closed space and generate a detected pressure value;
a temperature sensor, configured to measure an external temperature and generate a measured external temperature value;
a processing module configured to execute a predetermined information process; and
an operation detecting mechanism configured to detect an operation of the fluid control device by detecting movement or position of the actuator member, and/or by detecting operation by the opening-closing mechanism, and/or detecting an actuation force for the opening-closing mechanism, and to generate an information indicating the operation detected;
wherein the predetermined information process includes:
a discriminating process configured to discriminate one or more types of abnormality of the fluid control device, at least one of the types including a leaking of fluid from a fluid path, via an abnormality of the isolation member, into the closed space, the discriminating process including a comparing of the detected pressure value with a predetermined threshold value; and
a correcting process configured to correct the predetermined threshold value in accordance with the information from the operation detecting mechanism indicating the operation detected and the measured external temperature value.