US 11,988,211 B2
Vacuum pump
Joeri Coeckelbergs, Turnhout (BE); and Vicente Paul Guerrero Lule, Cologne (DE)
Assigned to Leybold GmbH, Cologne (DE)
Appl. No. 17/263,957
Filed by Leybold GmbH, Cologne (DE)
PCT Filed Aug. 1, 2019, PCT No. PCT/EP2019/070782
§ 371(c)(1), (2) Date Jan. 28, 2021,
PCT Pub. No. WO2020/025754, PCT Pub. Date Feb. 6, 2020.
Claims priority of application No. 20 2018 003 585.8 (DE), filed on Aug. 1, 2018.
Prior Publication US 2021/0310488 A1, Oct. 7, 2021
Int. Cl. F04C 28/08 (2006.01); F04C 25/02 (2006.01); F04C 28/28 (2006.01)
CPC F04C 28/08 (2013.01) [F04C 25/02 (2013.01); F04C 28/28 (2013.01); F04C 2240/81 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A vacuum pump, comprising
a housing having an inlet and an outlet,
at least one rotor arranged in the housing configured to convey a gaseous medium from the inlet to the outlet,
a motor configured to rotate the rotor,
a control device connected to the motor configured to control the motor, and
at least one sensor connected to the control device, wherein the at least one sensor is configured to sense at least one operating parameter of the vacuum pump,
wherein the control device comprises a correlation module, wherein the correlation module comprises a neural network, and the neural network is trained so that a sensor for at least one critical parameter is required only during training, and
wherein the correlation module is configured to correlate the sensed at least one operating parameter with the at least one critical parameter, and wherein the motor is controlled on the basis of the at least one critical parameter, and
further wherein the correlation module correlates the at least one operating parameter and the at least one critical parameter by means of at least one of: a regression algorithm, a fuzzy logic algorithm, or a machine learning algorithm,
wherein the at least one rotor of the vacuum pump comprises a first rotor wherein the at least one critical parameter is at least one of a distance between the first rotor and the housing or a bearing temperature, or
wherein the at least one rotor comprises a first rotor and a second rotor, and wherein the at least one critical parameter is at least one of a distance between the first rotor and the housing, a distance between the second rotor and the housing, a distance between the first rotor and the second rotor or a bearing temperature.