CPC F04C 25/02 (2013.01) [F04C 18/0215 (2013.01); F04C 18/0223 (2013.01); F04C 27/00 (2013.01); F04C 29/04 (2013.01); F04C 2240/60 (2013.01); F04C 2240/807 (2013.01)] | 9 Claims |
1. A dry dual-scroll vacuum pump, comprising a driving assembly and an upper cover located above the driving assembly, wherein the driving assembly comprises an output shaft (16), and a movable disk (6) eccentrically arranged on the output shaft (6); two groups of first scroll teeth (24) that are centrally symmetrical are arranged on a side of the movable disk (6) that faces the upper cover;
a fixed disk (4) is arranged at a lower end of the upper cover, second scroll teeth (23) that are in one-to-one correspondence with the first scroll teeth (24) are arranged on the fixed disk (4), and the first scroll teeth (24) are meshed with the second scroll teeth (23) to form a compression cavity; and the upper cover is further provided with an air inlet (5) and an air outlet (1), which correspond to the compression cavity;
wherein a first cooling cavity (3) is provided in the fixed disk (4), a lower end of the driving assembly is connected to a bottom cover (12), and a second cooling cavity (13) is provided in the bottom cover (12); the first cooling cavity (3) and the second cooling cavity (13) are in communication by means of a cooling channel (27) and form a cooling circulation system; and the cooling circulation system further comprises a liquid inlet (29) and a liquid outlet (30).
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