CPC C23C 8/30 (2013.01) | 17 Claims |
1. A method for case hardening a substrate including titanium, the method comprising:
providing the substrate to a chamber;
evacuating, via a first vacuum process, the chamber to achieve a vacuum therein;
heating the substrate;
providing a process gas to the chamber to diffuse hydrogen and a case hardening addition into the substrate; and
evacuating, via a second vacuum process, the chamber to achieve a vacuum to vacuum diffuse at least a portion of the hydrogen from the substrate.
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