US 11,987,883 B2
Powder atomic layer deposition apparatus for blowing powders
Jing-Cheng Lin, Hsinchu County (TW); Jung-Hua Chang, Hsinchu County (TW); and Chia-Cheng Ku, Hsinchu County (TW)
Assigned to SKY TECH INC., Hsinchu County (TW)
Filed by SKY TECH INC., Hsinchu County (TW)
Filed on May 30, 2021, as Appl. No. 17/334,775.
Claims priority of application No. 109138136 (TW), filed on Nov. 2, 2020.
Prior Publication US 2022/0136103 A1, May 5, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/455 (2006.01); C23C 16/44 (2006.01); C23C 16/54 (2006.01)
CPC C23C 16/45544 (2013.01) [C23C 16/4412 (2013.01); C23C 16/4417 (2013.01); C23C 16/54 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A powder atomic layer deposition apparatus for blowing powders, comprising:
a vacuum chamber, comprising a reaction space for accommodating a plurality of powders;
a shaft sealing device, comprising an outer tube connected to the vacuum chamber and an inner tube; wherein the outer tube has an accommodating space the accommodating space accommodate the inner tube and the inner tube has a connection space communicating the reaction space;
a driving unit, connected to the vacuum chamber via the outer tube of the shaft sealing device, wherein the driving unit drives the vacuum chamber to rotate through the outer tube of the shaft sealing device, and the driver unit is not connected to the inner tube; wherein when the driving unit drives the outer tube and the vacuum chamber to rotate, the inner tube does not rotate with the outer tube and the vacuum chamber;
at least one air extraction line, disposed in the connection space of the inner tube and fluidly connected to the reaction space of the vacuum chamber, for extracting a gas from the reaction space; and
at least one air intake line, disposed in the connection space of the inner tube and extending from the inner tube into the reaction space toward a surface of the reaction space, for transporting a non-reactive gas to the reaction space, wherein the non-reactive gas blows the powders around in the reaction space.