US 11,987,881 B2
Apparatus for depositing thin films using hydrogen peroxide
Leonard Rodriguez, Phoenix, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on May 19, 2021, as Appl. No. 17/324,191.
Claims priority of provisional application 63/029,210, filed on May 22, 2020.
Prior Publication US 2021/0363633 A1, Nov. 25, 2021
Int. Cl. C23C 16/452 (2006.01); C25B 1/30 (2006.01); C25B 1/50 (2021.01); C25B 9/01 (2021.01); C25B 9/21 (2021.01)
CPC C23C 16/452 (2013.01) [C25B 1/30 (2013.01); C25B 1/50 (2021.01); C25B 9/01 (2021.01); C25B 9/21 (2021.01)] 6 Claims
OG exemplary drawing
 
1. A reaction system configured to form a thin film on a substrate, comprising:
a reaction chamber configured to hold a substrate to be processed;
a first precursor source, the first precursor source configured to provide a first precursor gas to the substrate;
an inert gas source, the inert gas source configured to provide an inert gas to the substrate; and
a hydrogen peroxide source configured to provide on demand a liquid hydrogen peroxide solution, wherein the hydrogen peroxide source comprises:
an electrochemical cell comprising: a porous electrolyte, a first gas diffusion layer, a second gas diffusion layer, a catalyst layer, an activated carbon layer, a first membrane layer, and a second membrane layer;
a hydrogen source, the hydrogen source configured to provide a hydrogen gas, wherein the hydrogen gas passes through the first gas diffusion layer, the catalyst layer, and the first membrane layer into the porous electrolyte;
an oxygen source, the oxygen source configured to provide an oxygen gas, wherein the oxygen gas passes through the second gas diffusion layer, the activated carbon layer, and the second membrane layer into the porous electrolyte; and
a nitrogen source, the nitrogen source configured to provide a nitrogen (N2) gas to the porous electrolyte;
wherein the catalyst layer converts the hydrogen gas into a hydrogen ion (H+) gas; and
wherein the activated carbon layer converts the oxygen gas into an ion that forms a liquid phase (HO2−) complex.