US 11,987,871 B2
Electrodes for laser chambers having extended lifetime
Leyla Ramin, San Diego, CA (US)
Assigned to Cymer, LLC, San Diego, CA (US)
Filed by Cymer, LLC, San Diego, CA (US)
Filed on May 2, 2017, as Appl. No. 15/585,046.
Prior Publication US 2018/0320250 A1, Nov. 8, 2018
Int. Cl. C22C 9/04 (2006.01); H01S 3/038 (2006.01); H01S 3/225 (2006.01)
CPC C22C 9/04 (2013.01) [H01S 3/0388 (2013.01); H01S 3/2251 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An electrode comprising
a body having an elongated surface formed of a bismuth brass alloy, the bismuth brass alloy consisting of 30 weight percent of zinc, 1 weight percent to 10 weight percent of bismuth, and the balance copper, and the bismuth brass alloy having a microstructure that includes islands of bismuth dispersed within a base metal formed of copper and zinc and also includes bismuth at the grain boundaries of the base metal formed of copper and zinc, wherein a total amount of impurities contained in the bismuth brass alloy does not exceed 5 ppm.