CPC C03C 3/06 (2013.01) [G02B 5/0891 (2013.01); G02B 7/181 (2013.01); C03B 2201/42 (2013.01); C03C 17/40 (2013.01); C03C 2201/21 (2013.01); C03C 2201/23 (2013.01); C03C 2201/42 (2013.01)] | 19 Claims |
1. A substrate for an optical element configured to reflect extreme ultraviolet wavelength light,
wherein the substrate is made of titanium-doped quartz glass that has a surface region configured to be coated, and
wherein the titanium-doped quartz glass has, at least in a vicinity of the surface region, a proportion of Si—O—O—Si bonds of at least 1*1016/cm3 or a proportion of Si—Si bonds of at least 1*1016/cm3.
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