US 11,987,503 B2
Powder for film formation or sintering
Kento Matsukura, Omuta (JP); and Seiji Moriuchi, Omuta (JP)
Assigned to NIPPON YTTRIUM CO., LTD., (JP)
Appl. No. 17/603,022
Filed by NIPPON YTTRIUM CO., LTD., Omuta (JP)
PCT Filed Jul. 24, 2019, PCT No. PCT/JP2019/028954
§ 371(c)(1), (2) Date Oct. 12, 2021,
PCT Pub. No. WO2020/217552, PCT Pub. Date Oct. 29, 2020.
Claims priority of application No. 2019-085637 (JP), filed on Apr. 26, 2019.
Prior Publication US 2022/0194809 A1, Jun. 23, 2022
Int. Cl. C01F 17/34 (2020.01); C23C 4/11 (2016.01); C23C 14/08 (2006.01); C23C 14/32 (2006.01)
CPC C01F 17/34 (2020.01) [C23C 4/11 (2016.01); C23C 14/081 (2013.01); C23C 14/083 (2013.01); C23C 14/32 (2013.01); C01P 2002/60 (2013.01); C01P 2002/72 (2013.01); C01P 2002/76 (2013.01); C01P 2004/61 (2013.01); C01P 2006/12 (2013.01); C01P 2006/14 (2013.01); C01P 2006/16 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A powder for coating or sintering, exhibiting a peak assigned to cubic Y3Al5O12 and a peak assigned to orthorhombic YAlO3 in X-ray diffractometry,
wherein an intensity ratio of a peak assigned to a (112) plane of the orthorhombic YAlO3 to a peak assigned to a (420) plane of the cubic Y3Al5O12 is at least 0.01 and less than 1,
the powder exhibits a peak within a pore size range from 0.1 to 1 μm and a peak within a pore size range from 5 to 50 μm in a pore volume distribution relative to pore sizes as measured by mercury intrusion porosimetry,
a volume of pores with a pore size of from 0.1 to 1 μm is at least 0.16 mL/g and 1.0 mL/g or less, and
a ratio of a pore volume V1 to a pore volume V2 (V1/V2) is 0.3 to 1.0 where V1 is the volume of the pores with the pore size of from 0.1 to 1 μm and V2 is a volume of the pores with the pore size of from 5 to 50 μm.