| CPC B81B 3/0051 (2013.01) [B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01)] | 8 Claims |
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1. A micromechanical device comprising a first device part and a second device part which are adjacent to each other at least in a motion limiter region, and one of the first and second device parts is a mobile rotor and the other of the first and second device parts is a fixed stator,
and in the motion limiter region an edge of the first device part extends substantially in a lateral direction and an edge of the second device part also extends substantially in the lateral direction, and the edge of the first device part is separated from the edge of the second device part in the motion limiter region by a rotor-stator gap in a transversal direction which is orthogonal to the lateral direction,
and the micromechanical device further comprises a motion limiter which extends across the rotor-stator gap from the first device part to the second device part, and the motion limiter comprises a first stopper, and the micromechanical device further comprises a first counter-structure, and when the first or second device part which is the rotor undergoes motion in a restriction direction the motion limiter is configured to bring the first stopper into contact with the first counter-structure before the first device part comes into direct physical contact with the second device part,
wherein the motion limiter comprises a first attachment section which is attached to the edge of the first device part and extends toward the second device part, wherein the first attachment section is aligned on a first transversal axis, and the motion limiter further comprises a first elongated lever,
and a first side of said first elongated lever extends substantially in a first side direction from the first attachment section, and a second side of said first elongated lever extends substantially in a second side direction from the first attachment section, wherein the second side direction is opposite to the first side direction, and the first stopper is attached to the second side of said first elongated lever,
and the motion limiter further comprises a connecting structure which extends from the edge of the second device part to the first side of said first elongated lever, wherein the attachment point of the connecting structure on the first side of the first elongated lever is aligned on a second transversal axis,
and the motion limiter is configured to bring the first stopper into contact with the first counter-structure by rotating the first elongated lever about the first attachment point when the first or second device part which is the rotor undergoes motion in the restriction direction.
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