US 11,987,489 B2
Liquid lithium supply and regulation
Jean Delmas, Santa Clara, CA (US); and Bernard Frey, Livermore, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 10, 2023, as Appl. No. 18/120,229.
Application 18/120,229 is a continuation of application No. 17/544,358, filed on Dec. 7, 2021, granted, now 11,603,306.
Application 17/544,358 is a continuation of application No. 16/445,327, filed on Jun. 19, 2019, granted, now 11,198,604, issued on Dec. 14, 2021.
Claims priority of provisional application 62/692,225, filed on Jun. 29, 2018.
Prior Publication US 2023/0211998 A1, Jul. 6, 2023
Int. Cl. B67D 7/02 (2010.01); B65D 88/74 (2006.01); B67D 7/16 (2010.01); B67D 7/32 (2010.01); B67D 7/36 (2010.01); B67D 7/62 (2010.01); B67D 7/76 (2010.01); B67D 7/78 (2010.01); B67D 7/82 (2010.01); H05B 1/02 (2006.01)
CPC B67D 7/02 (2013.01) [B65D 88/748 (2013.01); B67D 7/16 (2013.01); B67D 7/32 (2013.01); B67D 7/3272 (2013.01); B67D 7/36 (2013.01); B67D 7/62 (2013.01); B67D 7/76 (2013.01); B67D 7/78 (2013.01); B67D 7/82 (2013.01); H05B 1/0297 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for flowing liquid lithium to a processing chamber, comprising:
flowing liquid lithium from a lithium refill container to a liquid lithium delivery module via a liquid lithium supply line, wherein the liquid lithium delivery module is fluidly coupled to the lithium refill container by the liquid lithium supply line;
flowing the liquid lithium through a first filter assembly downstream of the lithium refill container and upstream of the liquid lithium delivery module; and
flowing the liquid lithium from the liquid lithium delivery module to the processing chamber;
wherein the liquid lithium delivery module comprises:
a lithium storage region operable to store liquid lithium and comprises a liquid lithium storage tank having an outlet port;
a fluid supply line fluidly coupled downstream of the outlet port of the liquid lithium storage tank;
a second filter assembly positioned along the fluid supply line operable to remove impurities from the flow of the liquid lithium flowing through the fluid supply line;
a flow meter positioned downstream from the lithium storage region along the fluid supply line and operable to monitor the flow of the liquid lithium through the fluid supply line, wherein the second filter assembly is disposed upstream of the flow meter;
a flow control region operable to control a flow of the liquid lithium, comprising one or more valves operable to control the flow of the liquid lithium, wherein the flow control region is positioned downstream from the flow meter;
a fluid delivery line fluidly coupled downstream of the one or more valves and configured to be in fluid communication to the processing chamber; and
a third filter assembly positioned along the fluid delivery line downstream of the flow meter and upstream of the processing chamber and operable to remove impurities from the flow of the liquid lithium flowing through the fluid delivery line.