US 11,986,925 B2
Maintenance methods for polishing systems and articles related thereto
Shantanu Rajiv Gadgil, Santa Clara, CA (US); Sumit Subhash Patankar, Fremont, CA (US); Nathan Arron Davis, Gilbert, AZ (US); Michael J. Coughlin, Livermore, CA (US); and Allen L. D'Ambra, Burlingame, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 31, 2022, as Appl. No. 17/977,794.
Application 17/977,794 is a division of application No. 16/813,275, filed on Mar. 9, 2020, granted, now 11,484,987.
Prior Publication US 2023/0060141 A1, Mar. 2, 2023
Int. Cl. B24B 53/017 (2012.01); B05C 17/00 (2006.01); B24B 37/34 (2012.01); B65D 47/42 (2006.01); B65D 81/32 (2006.01); C09D 5/00 (2006.01); B05D 1/28 (2006.01); B05D 5/08 (2006.01)
CPC B24B 53/017 (2013.01) [B05C 17/00 (2013.01); B24B 37/34 (2013.01); B65D 81/3266 (2013.01); C09D 5/00 (2013.01); B05D 1/28 (2013.01); B05D 5/08 (2013.01); B65D 47/42 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method of forming a hydrophobic coating on a surface of a polishing system component, comprising:
cleaning the surface of the polishing system component to remove a polishing fluid residue therefrom; and
applying a hydrophobicity causing chemical solution to the surface of the polishing system component using a hydrophobicity applicator, the hydrophobicity applicator comprising:
an applicator article formed of an open-celled foam material which has a porosity of 60% or more, a density of 50 kg/m3 or more, and a glass transition temperature (Tg) of 25° C. or less.