US 11,986,922 B2
Techniques for combining CMP process tracking data with 3D printed CMP consumables
Jason G. Fung, Santa Clara, CA (US); Rajeev Bajaj, Fremont, CA (US); Daniel Redfield, Morgan Hill, CA (US); Aniruddh Jagdish Khanna, Fremont, CA (US); Mario Cornejo, San Jose, CA (US); Gregory E. Menk, Pleasanton, CA (US); and John Watkins, Los Gatos, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 31, 2019, as Appl. No. 16/731,492.
Application 16/731,492 is a division of application No. 14/935,134, filed on Nov. 6, 2015, granted, now 10,593,574.
Prior Publication US 2020/0135517 A1, Apr. 30, 2020
Int. Cl. B29C 64/00 (2017.01); B24B 37/26 (2012.01); B24B 49/00 (2012.01); B24B 49/10 (2006.01); B24B 49/14 (2006.01); B24B 49/16 (2006.01); B33Y 10/00 (2015.01); B33Y 80/00 (2015.01); H01L 21/306 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); B29L 31/00 (2006.01)
CPC B24B 37/26 (2013.01) [B24B 49/003 (2013.01); B24B 49/10 (2013.01); B24B 49/14 (2013.01); B24B 49/16 (2013.01); B33Y 10/00 (2014.12); B33Y 80/00 (2014.12); H01L 21/30625 (2013.01); H01L 21/67075 (2013.01); H01L 21/67253 (2013.01); H01L 21/67294 (2013.01); H01L 22/20 (2013.01); B29K 2995/0003 (2013.01); B29K 2995/0005 (2013.01); B29L 2031/736 (2013.01); H01L 22/12 (2013.01); H01L 22/26 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of manufacturing a polishing pad, comprising:
3D printing a plurality of polishing features of a polymeric body by distributing a first material, wherein the plurality of polishing features define a polishing surface configured to contact a substrate;
3D printing one or more base features of the polymeric body by distributing a second material that is different from the first material; and
disposing a radio frequency identification (RFID) tag on a surface of a recess formed in the one or more base features of the polymeric body and at a distance from the polishing surface, wherein
the one or more base features are each disposed at a distance from the plurality of polishing features,
the one or more base features and the plurality of polishing features are disposed in an alternating arrangement along a direction parallel to the polishing surface,
the RFID tag stores a plurality of information associated with two or more properties of the polymeric body, and
a region disposed between the polishing surface and the surface of the recess has a different composition than the first material of the plurality of polishing features of the polymeric body and the second material of the one or more base features of the polymeric body.