US 11,986,864 B2
Cleaning apparatus
Yukiyasu Masuda, Tokyo (JP); Hiromitsu Yoshimoto, Tokyo (JP); and Zentaro Kawasaki, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Oct. 12, 2021, as Appl. No. 17/450,570.
Claims priority of application No. 2020-177330 (JP), filed on Oct. 22, 2020.
Prior Publication US 2022/0126331 A1, Apr. 28, 2022
Int. Cl. B08B 3/12 (2006.01); B08B 13/00 (2006.01); H01L 21/67 (2006.01)
CPC B08B 3/123 (2013.01) [B08B 13/00 (2013.01); H01L 21/67023 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A cleaning apparatus comprising:
a spinner table for holding a workpiece thereon;
a cleaning nozzle for supplying cleaning water to the workpiece held on the spinner table;
an ultrasonic vibrator for applying ultrasonic vibrations to the cleaning water supplied from the cleaning nozzle to the workpiece;
a water layer forming unit for forming a layer of the cleaning water in a clearance between the cleaning nozzle and the workpiece, the water layer forming unit having a cover surrounding the cleaning nozzle; and
a drain unit for draining the cleaning water out of the cleaning apparatus, the drain unit configured for allowing the cleaning water supplied from the cleaning nozzle to the workpiece to flow therethrough,
a shaft;
a first arm having an end connected to the cover and another end connected to the shaft;
a second arm having an end connected to the cleaning nozzle and another end connected to the shaft; and
wherein the drain unit includes:
a first flow channel in the first arm,
a joint region in the shaft, connected to an end of the first flow channel, and
a suction flow channel in the shaft, connecting a suction source to the joint region, through which a gas separated from the cleaning water flows,
wherein the first flow channel is configured for draining the cleaning water from the water layer forming unit, and
wherein the second arm includes a second flow channel configured for supplying the cleaning water to the cleaning nozzle.