US 11,986,847 B2
Nozzle installation jig
Yoshitaka Abe, Toyama (JP); Nobuhito Shima, Toyama (JP); Hiromi Okada, Toyama (JP); Shinya Morita, Toyama (JP); and Mamoru Ohishi, Toyama (JP)
Assigned to KOKUSAI ELECTRIC CORPORATION, Tokyo (JP)
Filed by KOKUSAI ELECTRIC CORPORATION, Tokyo (JP)
Filed on Mar. 17, 2023, as Appl. No. 18/185,426.
Application 18/185,426 is a continuation of application No. 17/143,704, filed on Jan. 7, 2021, granted, now 11,633,753.
Claims priority of application No. 2020-023868 (JP), filed on Feb. 14, 2020.
Prior Publication US 2023/0211368 A1, Jul. 6, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B05B 15/65 (2018.01); C23C 16/455 (2006.01); F16L 27/08 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01)
CPC B05B 15/65 (2018.02) [C23C 16/45563 (2013.01); F16L 27/0845 (2013.01); H01L 21/67017 (2013.01); H01L 22/34 (2013.01); F16L 2201/10 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A nozzle installation jig comprising:
a first portion configured to make contact with a process vessel in which a nozzle is provided;
a frame arranged on the first portion and extending upward with respect to the first portion; and
a second portion provided on the frame with a sensor configured to detect a position of the nozzle in the process vessel.