CPC B05B 15/65 (2018.02) [C23C 16/45563 (2013.01); F16L 27/0845 (2013.01); H01L 21/67017 (2013.01); H01L 22/34 (2013.01); F16L 2201/10 (2013.01)] | 19 Claims |
1. A nozzle installation jig comprising:
a first portion configured to make contact with a process vessel in which a nozzle is provided;
a frame arranged on the first portion and extending upward with respect to the first portion; and
a second portion provided on the frame with a sensor configured to detect a position of the nozzle in the process vessel.
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