CPC A61B 8/4494 (2013.01) [A61B 8/0883 (2013.01); A61B 8/145 (2013.01); A61B 8/4483 (2013.01); A61B 8/4488 (2013.01); A61B 8/461 (2013.01); A61B 8/488 (2013.01); A61B 8/5207 (2013.01); A61B 8/546 (2013.01); B06B 1/0215 (2013.01); B06B 1/0238 (2013.01); B06B 1/0629 (2013.01); B06B 1/0662 (2013.01); B06B 1/0692 (2013.01); G01S 7/52046 (2013.01); G01S 7/52079 (2013.01); G01S 7/521 (2013.01); G01S 15/8925 (2013.01); H10N 30/1051 (2023.02); H10N 30/2047 (2023.02); H10N 30/2048 (2023.02); H10N 30/88 (2023.02); A61B 8/4427 (2013.01); A61B 8/4472 (2013.01); B06B 2201/76 (2013.01)] | 39 Claims |
1. A transceiver element, comprising:
a substrate;
a membrane suspending from the substrate; and
a transducer element mounted on the at least one membrane at an attachment area, the transducer element having a bottom electrode, a piezoelectric layer on the bottom electrode, and at least one top electrode on the piezoelectric layer, the transducer element generating a bending moment in response to applying an electrical potential across the bottom electrode and the at least one top electrode and developing an electrical charge in response to applying a bending moment thereto;
wherein the membrane has a first cross-sectional thickness in the attachment area and a second cross-sectional thickness in a deflection area of the membrane, the first cross-sectional thickness being different from the second cross-sectional thickness to permit a desired deflection profile of the membrane for enhancing sensitivity of the transducer element.
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