CPC A61B 8/4483 (2013.01) [A61B 8/06 (2013.01); B06B 1/00 (2013.01); B06B 1/0292 (2013.01); A61B 8/4444 (2013.01); A61B 8/483 (2013.01); A61B 8/5207 (2013.01); B06B 2201/76 (2013.01)] | 5 Claims |
1. An ultrasound device comprising:
a membrane proximate a surface of the ultrasound device;
a substrate distal from the surface;
an ultrasonic transducer comprising a cavity disposed between the membrane and the substrate;
a first bond pad configured for wire bonding and disposed at the surface of the ultrasound device, the first bond pad being electrically isolated from the membrane by a trench formed through the membrane;
a second bond pad configured for wire bonding and disposed at the surface of the ultrasound device and electrically coupled to the membrane; and
a first electrode having an inner circumference and an outer circumference and radial slots integrated within the first electrode, each of the radial slots having a first end terminating proximate to the inner circumference and proceeding radially to a second end terminating proximate to the outer circumference of the first electrode, wherein the cavity is disposed between the membrane and the first electrode.
|