US 11,659,759 B2
Method of making high resolution OLED fabricated with overlapped masks
Chung-Chia Chen, New Taipei (TW); Byung-Sung Kwak, Portland, OR (US); and Robert Jan Visser, Menlo Park, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 6, 2021, as Appl. No. 17/142,853.
Prior Publication US 2022/0216450 A1, Jul. 7, 2022
Int. Cl. H10K 71/00 (2023.01); H10K 59/35 (2023.01); H01L 51/56 (2006.01); H01L 27/32 (2006.01)
CPC H01L 51/56 (2013.01) [H01L 27/3211 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method, comprising:
positioning a first mask plate and a second mask plate adjacent to a substrate having an array including one or more first groups of first electroluminescent (EL) devices, the array including a pixel-per-inch (PPI) of at least about 400, and the first mask plate and the second mask plate are overlapped to form a mask arrangement having first apertures of the first mask plate overlapped with second apertures of the second mask plate forming one or more opening areas; and
evaporating a material through the one or more opening areas to deposit one or more first layers of the material onto a device area of each of the first EL devices, the device area of each of the first EL devices corresponding to the opening area of the mask arrangement of the first mask plate and the second mask plate.