US 11,658,635 B2
Joined body of piezoelectric material substrate and support substrate, and acoustic wave element
Yuji Hori, Owariasahi (JP); Takahiro Yamadera, Nagoya (JP); and Tatsuro Takagaki, Nagoya (JP)
Assigned to NGK INSULATORS, LTD., Nagoya (JP)
Filed by NGK INSULATORS, LTD., Nagoya (JP)
Filed on Jun. 12, 2020, as Appl. No. 16/900,337.
Application 16/900,337 is a continuation of application No. PCT/JP2018/042433, filed on Nov. 16, 2018.
Claims priority of application No. JP2017-252872 (JP), filed on Dec. 28, 2017.
Prior Publication US 2020/0313643 A1, Oct. 1, 2020
Int. Cl. H03H 9/02 (2006.01); H03H 9/25 (2006.01); H01L 41/312 (2013.01); H01L 41/337 (2013.01); H03H 3/08 (2006.01)
CPC H03H 9/02574 (2013.01) [H01L 41/312 (2013.01); H01L 41/337 (2013.01); H03H 3/08 (2013.01); H03H 9/02559 (2013.01); H03H 9/25 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A bonded body comprising:
a supporting substrate;
a piezoelectric material substrate comprising a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate; and
a bonding layer for bonding said supporting substrate and said piezoelectric material substrate,
wherein said bonding layer consists essentially of silicon oxide; and
wherein an intermediate part has a nitrogen concentration of 1×1019 atoms/cm3 or higher and 5×1020 atoms/cm3 or lower and a piezoelectric material substrate-side bonding part and a supporting substrate-side bonding part have nitrogen concentrations of 4×1017 atoms/cm3 or higher and 9×1018 atoms/cm3 or lower, provided that said bonding layer is divided into said piezoelectric material substrate-side bonding part, said supporting substrate-side bonding part and said intermediate part between said piezoelectric material substrate-side bonding part and said supporting substrate-side bonding part, and
wherein said intermediate part has a carbon concentration of 1×1019 atoms/cm3 or higher and 5×1020 atoms/cm3 or lower and said piezoelectric material substrate-side bonding part and said supporting substrate-side bonding part have carbon concentrations of 1×1017 atoms/cm3 or higher and 3×1018 atoms/cm3 or lower.