US 11,658,264 B2
Light emitting device having a substrate with a pattern of protrusions and manufacturing method thereof
Dae Hong Min, Gyeonggi-do (KR); Jun Ho Yoon, Gyeonggi-do (KR); Woo Cheol Gwak, Gyeonggi-do (KR); Jin Woo Huh, Gyeonggi-do (KR); and Yong Hyun Baek, Gyeonggi-do (KR)
Assigned to Seoul Viosys Co., Ltd., Gyeonggi-do (KR)
Filed by SEOUL VIOSYS CO., LTD., Gyeonggi-do (KR)
Filed on Sep. 18, 2020, as Appl. No. 17/25,254.
Application 17/025,254 is a continuation of application No. PCT/KR2019/008410, filed on Jul. 9, 2019.
Claims priority of application No. 10-2018-0079626 (KR), filed on Jul. 9, 2018; application No. 10-2018-0119585 (KR), filed on Oct. 8, 2018; and application No. 10-2018-0122759 (KR), filed on Oct. 15, 2018.
Prior Publication US 2021/0074883 A1, Mar. 11, 2021
Int. Cl. H01L 33/10 (2010.01)
CPC H01L 33/10 (2013.01) 19 Claims
OG exemplary drawing
 
1. A light emitting device, comprising:
a substrate;
a pattern of a plurality of protrusions protruding from the substrate in a first direction, the plurality of protrusions arranged side by side in a second direction being perpendicular to the first direction;
a first semiconductor layer provided on the substrate;
an active layer provided on the first semiconductor layer; and
a second semiconductor layer provided on the active layer, wherein:
each of the protrusions includes:
a first layer integrally formed with the substrate and protruding from an upper surface of the substrate in the first direction; and
a second layer provided on the first layer and formed of a material different from that of the first layer, wherein a distance between centers of two adjacent protrusions in the second direction corresponds to a pitch, and a ratio of a diameter of the protrusion to the pitch of the protrusion pattern is about 0.8 to about 1.0;
voids aligned with a side of the plurality of protrusions in the second direction, wherein the voids are located adjacent to an upper portion of the first layer near an edge of an interface between the first layer and the second layer;
wherein a refractive index of the first layer is greater than that of the second layer;
and
wherein the sum of the heights of the first layer and the second layer is more than 1.7 μm.