US 11,658,048 B2
Unit for supplying liquid, apparatus and method for treating substrate having the unit
Seong Soo Lee, Cheonan-si (KR); Buyoung Jung, Cheonan-si (KR); Gi Hun Choi, Changwon-si (KR); Myung A Jeon, Yeosu-si (KR); and Soo Young Park, Incheon (KR)
Assigned to Semes Co., Ltd., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Jun. 19, 2020, as Appl. No. 16/906,392.
Claims priority of application No. 10-2019-0075144 (KR), filed on Jun. 24, 2019.
Prior Publication US 2020/0402818 A1, Dec. 24, 2020
Int. Cl. H01L 21/67 (2006.01); H01L 21/673 (2006.01)
CPC H01L 21/6715 (2013.01) [H01L 21/67253 (2013.01); H01L 21/67309 (2013.01)] 18 Claims
OG exemplary drawing
1. An apparatus for treating a substrate, the apparatus comprising:
a treating container defining a treatment space inside the treating container;
a substrate support unit configured to support a substrate in the treatment space; and
a liquid supply unit configured to supply treatment liquid the substrate supported by the substrate support unit,
wherein the liquid supply unit includes:
a nozzle:
a supply line configured to supply the treatment liquid to the nozzle;
a first valve mounted in the supply line; and
a discharge line branching from a branch point downstream of the first valve in the supply line, the discharge line configured to discharge the treatment liquid from the supply line;
a second valve mounted in the discharge line, and
wherein in the supply line, a valve is absent in an area between the branch point and the nozzle, in the supply line, and
wherein a first part of a downstream area, which extends from the branch point in a downstream direction, having a curve shape;
a second part extending from the first part and provided at a position in a line with a position of the first part or lower than the position of the first part; and
a third part extending from the second part, positioned higher than the first part, and including an end of the downstream area, and
wherein a first sensor is installed in the third part to sense a water level of the treatment liquid in the downstream area.