US 11,658,016 B2
Shield for a substrate processing chamber
Kathleen Scheible, San Francisco, CA (US); Michael Allen Flanigan, Dutch Flat, CA (US); Goichi Yoshidome, Emeryville, CA (US); Adolph Miller Allen, Oakland, CA (US); and Cristopher Pavloff, San Francisco, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 10, 2019, as Appl. No. 16/409,757.
Application 16/409,757 is a division of application No. 14/846,951, filed on Sep. 7, 2015, granted, now 10,347,475.
Application 14/846,951 is a division of application No. 11/553,982, filed on Oct. 27, 2006, granted, now 9,127,362.
Claims priority of provisional application 60/732,324, filed on Oct. 31, 2005.
Prior Publication US 2019/0267220 A1, Aug. 29, 2019
Int. Cl. H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); H01L 21/687 (2006.01)
CPC H01J 37/3488 (2013.01) [C23C 14/3407 (2013.01); C23C 14/50 (2013.01); H01J 37/34 (2013.01); H01J 37/3441 (2013.01); H01J 37/3447 (2013.01); H01L 21/68735 (2013.01)] 20 Claims
OG exemplary drawing
1. A shield assembly encircling a sputtering target that faces a substrate support in a substrate processing chamber, the shield assembly comprising:
(i) a shield comprising:
(a) an outer band having a diameter sized to encircle the sputtering target, the outer band having upper and bottom ends, the upper end tapering in thickness in the direction of the bottom end, and the upper end having a tapered surface extending radially outwardly and adjacent to the sputtering target;
(b) a base plate extending radially inward from the bottom end of the outer band;
(c) an inner band joined to the base plate and at least partially surrounding a peripheral edge of the substrate support; and
(d) a ledge having a first opening; and
(ii) a heat exchanger having a plate having (i) an inner perimeter comprising a circular aperture sized to fit around the shield, (ii) an outer perimeter comprising a plurality of sides, (iii) a conduit therein with an inlet and outlet to flow heat exchange fluid therethrough, and (iv) a second opening aligned with the first opening of the ledge of the shield, to allow a fastener to pass through the first and second openings to fasten the shield to the heat exchanger.