US 11,658,000 B2
Sample support and method of fabricating same
Yuji Konyuba, Tokyo (JP); Tomohiro Haruta, Tokyo (JP); Yuta Ikeda, Tokyo (JP); and Tomohisa Fukuda, Tokyo (JP)
Assigned to JEOL Ltd., Tokyo (JP)
Filed by JEOL Ltd., Tokyo (JP)
Filed on Jun. 30, 2020, as Appl. No. 16/916,720.
Claims priority of application No. JP2019-122792 (JP), filed on Jul. 1, 2019.
Prior Publication US 2021/0005418 A1, Jan. 7, 2021
Int. Cl. H01J 37/20 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/20 (2013.01) [H01J 37/26 (2013.01); H01J 2237/2002 (2013.01); H01J 2237/2007 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A sample support for holding a sample floating on the surface of water, said sample support comprising:
a first region on which the sample is to be placed;
a second region of higher wettability than the first region, such that the first region repels water more than the second region;
a baseplate;
a sample support film supported by the baseplate; and
a metal film formed on the sample support film;
wherein said sample support film and said metal film have top surfaces which constitute said first region and said second region, respectively;
wherein said baseplate has a through hole; and
wherein said first region is in registry with the through hole and said second region is not in registry with the through hole.
 
8. A method of fabricating a sample support for holding a sample floating on the surface of water, comprising the steps of:
forming a sample support film;
forming a metal film on the sample support film; and
forming a baseplate having a through hole;
wherein the sample support film has: a first region on which the sample is to be placed; and a second region of higher wettability than the first region, such that the first region repels water more than the second region;
wherein the sample support film and the metal film have top surfaces which constitute the first and second regions, respectively; and
wherein said first region is in registry with the through hole and said second region is not in registry with the through hole.