US 11,657,059 B2
Search device, searching method, and plasma processing apparatus
Yutaka Okuyama, Tokyo (JP); Takeshi Ohmori, Tokyo (JP); Masaru Kurihara, Tokyo (JP); and Hyakka Nakada, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Filed by HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Filed on Feb. 25, 2019, as Appl. No. 16/284,879.
Claims priority of application No. JP2018-046238 (JP), filed on Mar. 14, 2018.
Prior Publication US 2019/0286632 A1, Sep. 19, 2019
Int. Cl. H01J 37/32 (2006.01); G06F 16/2458 (2019.01); H01L 21/67 (2006.01); G06N 5/04 (2023.01); G06N 20/00 (2019.01)
CPC G06F 16/2462 (2019.01) [G06N 5/04 (2013.01); G06N 20/00 (2019.01); H01J 37/3211 (2013.01); H01L 21/67276 (2013.01); H01J 2237/327 (2013.01); H01J 2237/334 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A search device which searches an input parameter value of each control parameter of a processing apparatus which corresponds to a goal output parameter value to be given to the processing apparatus, the search device comprising:
a processor; and
a memory,
wherein the memory comprises a sequence of programmed instructions for a search program which, when executed by the processor, causes the processor to search for the input parameter value which corresponds to a goal,
wherein the processor is configured to
build a prediction model from learning data which is sets containing a plurality of the input parameter value of the processing apparatus and output parameter values which are results of a processing that the processing apparatus performs on the basis of the input parameter values;
set a target output parameter value by interpolating values between the goal output parameter value and an output parameter value which is selected from the output parameter values and is closest to the goal output parameter value;
estimate input parameter values which correspond to the goal output parameter value and the target output parameter value; and
decide whether the output parameter value which is the result of the processing that the processing apparatus performs on the basis of the input parameter value converges to the goal output parameter value in a predetermined range,
wherein the input parameter value for which convergence is decided is output as the input parameter value which corresponds to the goal output parameter value,
wherein the processor is further configured to transfer the estimated input parameter value which corresponds to the goal output parameter value as an optimal processing condition to the processing apparatus via an output device, and
wherein the processing apparatus is an apparatus which processes a semiconductor based on the optimal processing condition received from the processor, or an apparatus which processes a semiconductor device which includes the semiconductor or a synthesis device which synthesizes materials based on the optimal processing condition received from the processor.