US 11,656,557 B2
Apparatus for treating substrate
Ki Sang Eum, Cheonan-si (KR); Jung Yul Lee, Cheongju-si (KR); Sun Wook Jung, Hwaseong-si (KR); and Yang Yeol Ryu, Cheonan-si (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-Do (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Nov. 22, 2021, as Appl. No. 17/531,941.
Claims priority of application No. 10-2020-0157853 (KR), filed on Nov. 23, 2020.
Prior Publication US 2022/0163900 A1, May 26, 2022
Int. Cl. G03F 7/20 (2006.01)
CPC G03F 7/70916 (2013.01) 18 Claims
OG exemplary drawing
 
1. An apparatus for treating a substrate, the apparatus comprising:
a processing container having an inner space;
a support unit having a support plate configured to support and rotate the substrate in the inner space;
a liquid supply unit configured to supply treating liquid to the substrate supported by the support unit; and
an exhaust unit configured to exhaust an air flow in the inner space,
wherein the support unit comprises:
a rotary shaft rotating the support plate;
an actuator coupled to the rotary shaft and providing rotation power to the rotary shaft,
wherein the processing container comprises:
an outer cup providing the inner space;
an inner cup placed in the inner space to be apart from the outer cup, and surrounding the rotary shaft,
wherein the inner cup defines an exhaust space in an area below the support plate,
wherein the exhaust unit includes:
an air flow guide duct guiding a flow direction of an air flow flowing on the substrate to an outer side of the substrate due to a rotation of the substrate supported by the support unit, and the air flow guide duct having an inlet into which an air flow is introduced;
a separate exhaust pipe for exhausting an air flow introduced into the exhaust space to an outside of the inner space; and
an integrated exhaust pipe with an installed pressure adjustment member, the separate exhaust pipe and the air flow guide duct being connected to the integrated exhaust pipe,
wherein the air flow guide duct is placed at an outer side of the processing container, and
wherein one end of the air flow guide duct is connected to the outer cup, and another end is connected to the integrated exhaust pipe.