US 11,656,549 B2
Resist composition and method of forming resist pattern
Masahito Yahagi, Kawasaki (JP); and Yoichi Hori, Kawasaki (JP)
Assigned to Tokyo Ohka Kogyo Co., Ltd., Kawasaki (JP)
Filed by TOKYO OHKA KOGYO CO., LTD., Kawasaki (JP)
Filed on Nov. 2, 2020, as Appl. No. 17/86,943.
Claims priority of application No. JP2019-201623 (JP), filed on Nov. 6, 2019.
Prior Publication US 2021/0132495 A1, May 6, 2021
Int. Cl. G03F 7/004 (2006.01); C08L 33/14 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); C08F 212/14 (2006.01); C08F 220/18 (2006.01)
CPC G03F 7/0045 (2013.01) [C08F 212/24 (2020.02); C08F 220/18 (2013.01); C08L 33/14 (2013.01); G03F 7/0392 (2013.01); G03F 7/2004 (2013.01)] 12 Claims
 
1. A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid,
the resist composition comprising a resin component (A1) and an acid-generator component (B),
the resin component (A) including:
a structural unit (a01) derived from a compound represented by general formula (a01-1) shown below,
a structural unit (a02) derived from a compound represented by general formula (a02-1) shown below, and
a structural unit (a03) derived from a compound represented by general formula (a03-1) shown below:

OG Complex Work Unit Chemistry
wherein W01 represents a polymerizable group-containing group; provided that the polymerizable group-containing group represented by W01 contains no oxygen atom; Wa01 represents an aromatic hydrocarbon group; part or all of the hydrogen atoms of the aromatic hydrocarbon group may be substituted with a substituent other that a hydroxy group; Wa01 and W01 may form a condensed ring; n01 represents 1 or 2; W02 represents a polymerizable group-containing group; provided that the polymerizable group-containing group represented by W02 contains an oxygen atom; Wa02 represents an aromatic hydrocarbon group; part or all of the hydrogen atoms of the aromatic hydrocarbon group may be substituted with a substituent selected from the group consisting of a carboxy group, a halogen atom, an alkoxy group, and an alkyloxycarbonyl group; Wa02 and W02 may form a condensed ring; n02 represents 1 or 2; W03 represents a polymerizable group-containing group; provided that the polymerizable group-containing group represented by W03 may contain an oxygen atom; Ya03 represents a carbon atom; Xa03 represents a group which forms an alicyclic hydrocarbon group together with Ya03; Re00 represents a hydrocarbon group which may have a substituent; and
the acid-generator component (B) is a compound represented by general formula (b-1): shown below:

OG Complex Work Unit Chemistry
wherein R101 represents a cyclic group which may have a substituent; R102 represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms; Y101 represents a divalent group containing an oxygen atom; V101 represents a single bond, an alkylene group or a fluorinated alkylene group; m represents an integer of 1 or more; and M′m+ represents an m-valent onium cation.