US 11,656,412 B2
Methods and system for wavelength tunable optical components and sub-systems
Francois Menard, Trois-Rivieres (CA); Michael Menard, Verdun (CA); Frederic Nabki, Montreal (CA); Martin Berard, Repentigny (CA); and Jonathan Briere, Terrebonne (CA)
Assigned to Aeponyx Inc., Repentigny (CA)
Filed by AEPONYX INC., Montreal (CA)
Filed on Jul. 23, 2021, as Appl. No. 17/383,967.
Application 17/383,967 is a continuation of application No. 16/658,958, filed on Oct. 21, 2019, granted, now 11,086,078.
Application 16/658,958 is a continuation of application No. 15/124,198, granted, now 10,466,421, issued on Jan. 19, 2017, previously published as PCT/CA2015/000135, filed on Mar. 9, 2015.
Claims priority of provisional application 62/037,655, filed on Aug. 15, 2014.
Claims priority of provisional application 61/950,238, filed on Mar. 10, 2014.
Claims priority of provisional application 61/949,484, filed on Mar. 7, 2014.
Prior Publication US 2021/0349265 A1, Nov. 11, 2021
Int. Cl. G02B 6/35 (2006.01); G02B 6/124 (2006.01); G02B 6/12 (2006.01); H01S 5/14 (2006.01); H01S 5/02216 (2021.01); H01S 5/02 (2006.01); H01S 5/12 (2021.01); G02B 26/08 (2006.01); H01S 5/02325 (2021.01)
CPC G02B 6/3518 (2013.01) [G02B 6/12002 (2013.01); G02B 6/124 (2013.01); G02B 6/12007 (2013.01); G02B 6/357 (2013.01); G02B 6/3596 (2013.01); H01S 5/021 (2013.01); H01S 5/02216 (2013.01); H01S 5/12 (2013.01); H01S 5/141 (2013.01); G02B 26/0841 (2013.01); G02B 2006/12147 (2013.01); H01S 5/02325 (2021.01)] 17 Claims
OG exemplary drawing
 
1. An optical device comprising:
a microoptoelectromechanical systems (MOEMS) element integrated upon a substrate comprising:
a suspended portion movable relative to the substrate;
a non-suspended portion;
a suspended optical waveguide formed upon the suspended portion of the MOEMS element having a waveguide facet disposed proximate a facet of the suspended portion and opposite a facet of the non-suspended portion;
a microelectromechanical systems (MEMS) element comprising a first part forming part of the non-suspended portion and a second part coupled to the suspended portion of the MOEMS element;
one or more non-suspended optical waveguides disposed upon the substrate, each non-suspended optical waveguide having another waveguide facet disposed in a predetermined position relative to the facet of the non-suspended portion such that translation of the waveguide facet of the suspended optical waveguide relative to the facet of the non-suspended portion under the action of the MEMS element results in optical coupling to and from the suspended optical waveguide from and to a predetermined non-suspended optical waveguide of the one or more non-suspended optical waveguides.