US 11,656,409 B2
Optical antenna for photonic integrated circuit and methods to form same
Yusheng Bian, Ballston Lake, NY (US); and Qizhi Liu, Lexington, MA (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GLOBALFOUNDRIES U.S. Inc., Santa Clara, CA (US)
Filed on Mar. 10, 2021, as Appl. No. 17/197,133.
Prior Publication US 2022/0291446 A1, Sep. 15, 2022
Int. Cl. G02B 6/124 (2006.01); G02B 6/13 (2006.01)
CPC G02B 6/124 (2013.01) [G02B 6/13 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical antenna for a photonic integrated circuit (PIC), the optical antenna comprising:
a semiconductor waveguide on a semiconductor layer, the semiconductor waveguide including a first vertical sidewall over the semiconductor layer;
a nitride material on an upper surface of the semiconductor waveguide; and
a first plurality of grating protrusions extending horizontally from the first vertical sidewall of the semiconductor waveguide.