US 11,656,344 B2
Light-based position measurement device with atmospheric correction
John M. Hoffer, Jr., Columbia, MD (US)
Assigned to TVS HOLDINGS, LLC, Columbia, MD (US)
Appl. No. 17/619,890
Filed by John M. Hoffer, Jr., Columbia, MD (US)
PCT Filed Apr. 28, 2021, PCT No. PCT/US2021/029567
§ 371(c)(1), (2) Date Dec. 16, 2021,
PCT Pub. No. WO2021/222360, PCT Pub. Date Nov. 4, 2021.
Claims priority of provisional application 63/016,964, filed on Apr. 28, 2020.
Prior Publication US 2022/0326363 A1, Oct. 13, 2022
Int. Cl. G01S 7/48 (2006.01); G01S 7/497 (2006.01); G01S 7/481 (2006.01); G01S 17/08 (2006.01)
CPC G01S 7/497 (2013.01) [G01S 7/4816 (2013.01); G01S 7/4817 (2013.01); G01S 17/08 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A position measurement system comprising:
a) a measurement source comprising a measurement light source that emits a measurement beam; said measurement beam being a light beam;
b) a target that moves with respect to said measurement source and wherein said target receives the measurement beam;
c) a wavefront sensor that receives said measurement beam;
wherein said wavefront sensor produces wavefront data that includes positional information and distortion information; and
d) a processor that operates a transverse measurement and control algorithm and produces a measurement data output comprising a transverse measurement of said target from said positional information and said distortion information of said wavefront data;
e) a transverse beam splitter, which is a beam splitter; and
f) a beam position sensing device;
wherein said transverse beam splitter splits the measurement beam into a wavefront distortion measurement beam that is directed to the wavefront sensor and a position measurement beam that is directed to said beam position sensing device;
wherein said beam position sensing device receives the measurement beam and produces beam position data; and
wherein the transverse measurement and control algorithm also receives said beam position data to produce the transverse measurement.