US 11,656,272 B1
Test system with a thermal head comprising a plurality of adapters and one or more cold plates for independent control of zones
Thomas P. Jones, Escondido, CA (US); Samer Kabbani, Laguna Niguel, CA (US); Chan See Jean, Singapore (SG); and Paul R. Hoffman, San Diego, CA (US)
Assigned to AEM Holdings Ltd., Singapore (SG)
Filed by AEM Holdings Ltd., Singapore (SG)
Filed on Oct. 21, 2022, as Appl. No. 18/48,836.
Int. Cl. G01R 31/28 (2006.01)
CPC G01R 31/2868 (2013.01) [G01R 31/2875 (2013.01); G01R 31/2877 (2013.01); G01R 31/2891 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A test system for testing one or more devices under test, comprising:
a thermal head for controlling one or more temperatures of the one or more devices under test, the thermal head comprising:
a plurality of adapters thermally coupled to one or more components of the one or more devices under test;
a thermal interface material located on at least one side of at least one of the plurality of adapters; and
one or more cold plates thermally coupled to the plurality of adapters, wherein the one or more cold plates are configured to cool the plurality of adapters; and
one or more thermal controllers configured to independently control the one or more temperatures of the one or more components of the one or more devices under test.