US 11,656,218 B2
Liquid tank formation method, measurement device, and analysis device
Mayu Aoki, Tokyo (JP); Itaru Yanagi, Tokyo (JP); Kunio Harada, Tokyo (JP); and Kenichi Takeda, Tokyo (JP)
Assigned to HITACHI, LTD., Tokyo (JP)
Appl. No. 16/464,835
Filed by HITACHI, LTD., Tokyo (JP)
PCT Filed Oct. 12, 2017, PCT No. PCT/JP2017/036944
§ 371(c)(1), (2) Date May 29, 2019,
PCT Pub. No. WO2018/105229, PCT Pub. Date Jun. 14, 2018.
Claims priority of application No. JP2016-237960 (JP), filed on Dec. 7, 2016.
Prior Publication US 2019/0293625 A1, Sep. 26, 2019
Int. Cl. G01N 33/487 (2006.01); G01N 27/447 (2006.01); G01N 27/04 (2006.01); G01N 27/00 (2006.01)
CPC G01N 33/48721 (2013.01) [G01N 27/00 (2013.01); G01N 27/04 (2013.01); G01N 27/44791 (2013.01)] 2 Claims
OG exemplary drawing
 
1. A method comprising the steps of:
introducing a solution between a substrate with a membrane in which the membrane is provided to close a plurality of openings disposed in an array and a substrate with independent electrodes in which a plurality of the independent electrodes are disposed in an array;
aligning the substrate with the membrane and the substrate with the independent electrodes to cause the openings to correspond to the independent electrodes in a one-to-one manner;
pressure bonding the substrate with the membrane and the substrate with the independent electrodes with a partition wall between the substrate with the membrane and the substrate with the independent electrodes, the partition wall having a plurality of openings corresponding to the independent electrodes disposed in the array; and
forming a sealed liquid tank surrounded by at least the membrane and the partition wall by the pressure bonding,
wherein in the step of introducing the solution, the solution is introduced to cover the plurality of openings of the partition wall to form a plurality of sealed liquid tanks surrounded by at least the membrane and the partition wall having the plurality of openings, and
wherein the method further comprises the steps of:
applying a voltage between the adjacent independent electrodes to measure a leak current after forming the plurality of sealed liquid tanks; and
determining that a compartment including the independent electrodes to be defective when a value of the leak current is equal to or more than a preset threshold.