US 11,656,138 B2
Pressure sensor assembly
Nicholas Edward Meyer, Chaska, MN (US); Mark George Romo, Eden Prairie, MN (US); Eric Paul Petersen, Minnetonka, MN (US); Timothy David Lasonne, St. Paul, MN (US); and David Jonathon Hillman, Prescott, WI (US)
Assigned to ROSEMOUNT INC., Shakopee, MN (US)
Filed by Rosemount Inc., Shakopee, MN (US)
Filed on Jun. 19, 2020, as Appl. No. 16/906,194.
Prior Publication US 2021/0396615 A1, Dec. 23, 2021
Int. Cl. G01L 9/02 (2006.01); G01L 7/08 (2006.01); G01L 19/14 (2006.01); G01L 9/00 (2006.01); G01L 13/02 (2006.01)
CPC G01L 9/0051 (2013.01) [G01L 9/0044 (2013.01); G01L 13/025 (2013.01); G01L 9/0048 (2013.01); G01L 19/145 (2013.01)] 18 Claims
OG exemplary drawing
1. A pressure sensor assembly comprising:
a pressure sensor including:
an electrically conductive sensing layer including a sensor diaphragm extending between perimeter support regions, the sensor diaphragm having a reduced thickness relative to the perimeter support regions;
a backing layer assembly comprising one or more electrically conductive backing layers including a first backing layer having a bottom surface that is bonded to a top surface of the sensing layer through a first electrically insulative bond;
a sensor element having an electrical parameter that changes based on a deflection of the sensor diaphragm in response to a pressure difference between a first pressure on a first side of the sensor diaphragm and a second pressure on a second side of the sensor diaphragm that is opposite the first side; and
a notch formed in an exposed and uninsulated side of at least one of the sensing layer and the backing layer assembly, wherein the notch defines a gap between electrically conductive side edges of the pressure sensor that provides electrical insulation from voltage arcing between the electrically conductive side edges;
a pedestal including a bottom surface that is bonded to a top surface of the backing layer assembly; and
an electrically conductive header having a header cavity;
wherein the first electrically insulative layer electrically insulates the sensing layer from the pedestal and the header.