US 11,656,079 B2
Sensor and electronic device
Hiroki Hiraga, Saitama Saitama (JP); Ryunosuke Gando, Yokohama Kanagawa (JP); Yasushi Tomizawa, Tokyo (JP); Fumito Miyazaki, Yokohama Kanagawa (JP); Daiki Ono, Yokohama Kanagawa (JP); Kei Masunishi, Kawasaki Kanagawa (JP); and Etsuji Ogawa, Kawasaki Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 25, 2021, as Appl. No. 17/445,922.
Claims priority of application No. JP2021-029719 (JP), filed on Feb. 26, 2021.
Prior Publication US 2022/0276052 A1, Sep. 1, 2022
Int. Cl. G01C 19/5677 (2012.01); G01C 19/5733 (2012.01); G01C 19/5726 (2012.01)
CPC G01C 19/5677 (2013.01) [G01C 19/5726 (2013.01); G01C 19/5733 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A sensor, comprising:
a sensor part,
the sensor part including a supporter and a movable part,
the movable part including
a movable member located around the supporter in a first plane, and
a plurality of structure members located between the supporter and the movable member,
the plurality of structure members having bent shapes,
the plurality of structure members connecting the movable member with the supporter,
the movable member being capable of vibrating,
the movable part having the supporter as a center of rotational symmetry,
the movable part having a plurality of mirror planes,
the plurality of mirror planes passing through the center of the rotational symmetry and crossing the first plane,
wherein
the sensor part further includes a first electrode and a second electrode,
a direction from the center of the rotational symmetry toward the first electrode is along a first direction,
the first direction is along the first plane,
a direction from the center of the rotational symmetry toward the second electrode is along a second direction,
the second direction is along the first plane and crosses the first direction,
the movable member includes a first counter part and a second counter part,
the first counter part faces the first electrode,
the first counter part and the first electrode mesh in a comb teeth configuration,
the second counter part faces the second electrode, and
the second counter part and the second electrode mesh in a comb teeth configuration.