US 11,656,077 B2
Pseudo-extensional mode MEMS ring gyroscope
Igor P. Prikhodko, Reading, MA (US); and Michael Judy, Ipswich, MA (US)
Assigned to Analog Devices, Inc., Wilmington, MA (US)
Filed by Analog Devices, Inc., Norwood, MA (US)
Filed on Dec. 16, 2019, as Appl. No. 16/716,386.
Claims priority of provisional application 62/799,382, filed on Jan. 31, 2019.
Prior Publication US 2020/0249020 A1, Aug. 6, 2020
Int. Cl. G01C 19/24 (2006.01); G01C 19/5684 (2012.01); B81B 3/00 (2006.01); G01C 19/567 (2012.01); G01C 19/5677 (2012.01)
CPC G01C 19/24 (2013.01) [B81B 3/0027 (2013.01); G01C 19/567 (2013.01); G01C 19/5677 (2013.01); G01C 19/5684 (2013.01); B81B 2201/0242 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A microelectromechanical systems (MEMS) gyroscope comprising:
a vibrating ring structure comprising a first plurality of concentric rings and a plurality of flexural members;
at least one pair of drive electrodes configured to electrostatically apply a voltage to the vibrating ring structure to excite the vibrating ring structure in an extensional mode, wherein:
the at least one pair of drive electrodes comprises a first drive electrode and a second drive electrode positioned opposite each other on inner and outer sides of the first plurality of concentric rings and configured to operate with a same polarity signal;
at least one pair of sense electrodes configured to electrostatically sense the extensional mode of the vibrating ring structure, wherein:
the at least one pair of sense electrodes comprises a first sense electrode and a second sense electrode positioned opposite each other on inner and outer sides of the first plurality of concentric rings and configured to sense a same polarity signal;
a first support structure configured to suspend the vibrating ring structure, the first support structure positioned on an inner side of the first drive electrode and the first sense electrode; and
a second support structure configured to suspend the vibrating ring structure, the second support structure positioned on an outer side of the second drive electrode and the second sense electrode.