US 11,655,405 B2
Method of manufacturing cerium dioxide powder and cerium dioxide powder
Chung-Hsin Lu, Taipei (TW); Yong-Jian Liu, Taipei (TW); Shu-Hao Huang, Taichung (TW); and Chi-Ming Yang, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu (TW); and NATIONAL TAIWAN UNIVERSITY, Taipei (TW)
Filed on Sep. 11, 2015, as Appl. No. 14/852,428.
Claims priority of application No. 103131595 (TW), filed on Sep. 12, 2014.
Prior Publication US 2016/0075564 A1, Mar. 17, 2016
Int. Cl. C01F 17/00 (2020.01); C09K 3/14 (2006.01); C01F 17/235 (2020.01)
CPC C09K 3/1409 (2013.01) [C01F 17/235 (2020.01); C01P 2002/72 (2013.01); C01P 2004/01 (2013.01); C01P 2004/04 (2013.01); C01P 2004/64 (2013.01); C01P 2006/60 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of manufacturing a cerium dioxide powder, the method comprising:
providing a mixed solution consisting of a cerium salt, a tertiary amine and solvent, wherein:
the tertiary amine is selected from the group consisting of bicyclic tertiary alkyl amine, tricyclic tertiary alkyl amine and a combination thereof, and
the cerium salt comprises only cerium carboxylate; and
performing a solvothermal reaction of the mixed solution at a temperature in a range of 50° C. to 300° C. to form the cerium dioxide powder.