US 11,655,141 B2
Fabrication techniques and structures for gettering materials in ultrasonic transducer cavities
Jianwei Liu, Fremont, CA (US); Keith G. Fife, Palo Alto, CA (US); Joseph Lutsky, Los Altos, CA (US); and Lingyun Miao, Fremont, CA (US)
Assigned to BFLY OPERATIONS, INC., Burlington, MA (US)
Filed by BFLY OPERATIONS, INC., Burlington, MA (US)
Filed on Sep. 27, 2019, as Appl. No. 16/585,283.
Claims priority of provisional application 62/738,502, filed on Sep. 28, 2018.
Prior Publication US 2020/0102214 A1, Apr. 2, 2020
Int. Cl. B81B 7/00 (2006.01); B81C 1/00 (2006.01); H04R 31/00 (2006.01); A61B 8/00 (2006.01); G10K 13/00 (2006.01); G10K 11/28 (2006.01)
CPC B81B 7/0038 (2013.01) [A61B 8/4483 (2013.01); B81C 1/00158 (2013.01); G10K 13/00 (2013.01); H04R 31/003 (2013.01); B81B 2201/0271 (2013.01); G10K 11/28 (2013.01)] 16 Claims
OG exemplary drawing
1. A method of forming an ultrasound transducer device, the method comprising:
forming one or more insulating layers over a bottom electrode and over a getter material;
removing the one or more insulating layers from the getter material;
bonding a membrane to a substrate so as to form a sealed cavity therebetween, wherein a surface located within and exposed to the sealed cavity comprises the getter material.