US 11,654,491 B2
Precision machine tool
Yohei Arimatsu, Yamanashi-ken (JP)
Assigned to FANUC CORPORATION, Yamanashi (JP)
Filed by FANUC CORPORATION, Yamanashi (JP)
Filed on Jan. 21, 2020, as Appl. No. 16/747,872.
Claims priority of application No. JP2019-011735 (JP), filed on Jan. 25, 2019.
Prior Publication US 2020/0238389 A1, Jul. 30, 2020
Int. Cl. B23B 7/10 (2006.01); B23Q 17/24 (2006.01); B23B 1/00 (2006.01); B23Q 1/64 (2006.01); B23Q 1/26 (2006.01); B23Q 5/00 (2006.01); G05B 19/18 (2006.01); B23Q 1/72 (2006.01); H04N 23/61 (2023.01); H04N 23/62 (2023.01)
CPC B23B 1/00 (2013.01) [B23B 7/10 (2013.01); B23Q 1/26 (2013.01); B23Q 1/64 (2013.01); B23Q 1/72 (2013.01); B23Q 5/00 (2013.01); B23Q 17/24 (2013.01); B23Q 17/2404 (2013.01); B23Q 17/2409 (2013.01); G05B 19/182 (2013.01); H04N 23/61 (2023.01); H04N 23/62 (2023.01)] 9 Claims
OG exemplary drawing
 
1. A precision machine tool that uses a tool to perform precision machining on a workpiece comprising:
a tool support configured to support the tool;
a moving mechanism actively coupled to the tool support wherein the moving mechanism moves the tool support;
a controller operatively coupled to the tool wherein the controller is configured to provide machining commands to the tool according to a machining program for machining a workpiece with a machining accuracy in an order of 10 nanometers or less; and
one or a plurality of imaging devices fixed to the tool support or the moving mechanism, wherein the one or a plurality of imaging devices each have an imaging unit that is operatively coupled to the controller to position the image unit to capture an image of a machining point specified by the machining program on the workpiece with respect to the tool, wherein each imaging unit comprises
at least one objective lens located at a proximal end of the imaging unit;
an image sensor located distal of the at least one objective lens,
wherein the imaging unit is positioned to capture an image of the machining point having a length per pixel of 0.03 mm or less.