US 11,654,460 B2
Megasonic clean with cavity property monitoring
Banqiu Wu, San Jose, CA (US); Khalid Makhamreh, Los Gatos, CA (US); and Eliyahu Shlomo Dagan, Sunnyvale, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 14, 2021, as Appl. No. 17/550,903.
Claims priority of provisional application 63/270,525, filed on Oct. 21, 2021.
Prior Publication US 2023/0127302 A1, Apr. 27, 2023
Int. Cl. B08B 13/00 (2006.01); B08B 3/12 (2006.01); G01B 11/30 (2006.01)
CPC B08B 3/123 (2013.01) [B08B 13/00 (2013.01); G01B 11/303 (2013.01)] 9 Claims
OG exemplary drawing
1. A megasonic cleaning chamber, comprising:
a chamber body defining an interior volume therein;
a substrate support to support a substrate disposed in the interior volume;
a supply tube comprising a transparent material configured to direct a cleaning fluid to the substrate support;
a megasonic power generator coupled to the supply tube to provide megasonic power to the cleaning fluid;
a megasonic transducer coupled to the megasonic power generator and the supply tube to create megasonic waves in the cleaning fluid and to form cavities in the cleaning fluid, wherein the megasonic transducer is configured to direct the megasonic waves and cavities toward the substrate support; and
one or more sensors configured to generate a signal indicative of a property of the cavities in the cleaning fluid.