US 12,309,916 B2
Method of verifying fault of inspection unit, inspection apparatus and inspection system
Kwan Seong Kim, Suwon-si (KR); Myung Ho Kim, Cheonan-si (KR); Nam Kyu Park, Namyangju-si (KR); and Joo Hyuk Kim, Seoul (KR)
Assigned to KOH YOUNG TECHNOLOGY INC., Seoul (KR)
Filed by KOH YOUNG TECHNOLOGY INC., Seoul (KR)
Filed on Jun. 29, 2022, as Appl. No. 17/853,440.
Application 17/853,440 is a continuation in part of application No. 16/074,493, granted, now 11,410,297, previously published as PCT/KR2017/001253, filed on Feb. 6, 2017.
Claims priority of application No. 10-2016-0014364 (KR), filed on Feb. 4, 2016.
Prior Publication US 2022/0330420 A1, Oct. 13, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H05K 1/02 (2006.01); G06T 1/00 (2006.01); G06T 7/00 (2017.01)
CPC H05K 1/0269 (2013.01) [G06T 1/0014 (2013.01); G06T 7/0002 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method of verifying whether an inspection device has a fault, the method comprising:
providing a verification reference body formed on a frame attached to an inspection system;
positioning the inspection device over the verification reference body;
obtaining image data of the verification reference body through the inspection device;
verifying whether the inspection device has a fault by extracting a movement error and a height error of the inspection device from the image data; and
generating a verification result indicating whether the inspection device has a fault,
wherein the verification reference body comprises a flat plate and a plurality of markers for verifying the movement error and the height error of the inspection device including a height marker having a predetermined height for verifying the height error, the flat plate having an area indicating a height reference, and
wherein the height error of the inspection device is extracted from an image data of at least one of the height reference or the height marker.