US 12,308,618 B2
Matrix addressable vertical cavity surface emitting laser array
Yeyu Zhu, San Jose, CA (US); Eric R. Hegblom, Sunnyvale, CA (US); and Yuefa Li, San Jose, CA (US)
Assigned to Lumentum Operations LLC, San Jose, CA (US)
Filed by Lumentum Operations LLC, San Jose, CA (US)
Filed on Nov. 30, 2021, as Appl. No. 17/538,592.
Claims priority of provisional application 63/201,360, filed on Apr. 26, 2021.
Prior Publication US 2022/0344909 A1, Oct. 27, 2022
Int. Cl. H01S 5/42 (2006.01); H01S 5/042 (2006.01); H01S 5/183 (2006.01)
CPC H01S 5/423 (2013.01) [H01S 5/04254 (2019.08); H01S 5/18344 (2013.01); H01S 5/04257 (2019.08); H01S 5/18311 (2013.01); H01S 5/1835 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A vertical cavity surface emitting laser (VCSEL) array, comprising:
a substrate;
a set of emitters disposed in a grid arrangement;
a set of cathodes disposed on the substrate in a first direction, wherein a cathode, of the set of cathodes, is defined by a serpentine shape,
wherein the cathode is disposed between a first column and a second column of the set of cathodes in the grid arrangement, in the first direction, and
wherein the serpentine shape of the cathode is defined by curves configured around a subset of the set of emitters that are in the first column and the second column; and
a set of anodes disposed on the substrate in a second direction, wherein an anode, of the set of anodes, is defined by the serpentine shape.