US 12,308,617 B2
Light emitting device and projector
Yohei Nakagawa, Tokyo to Shinjuke ku (JP); Shunsuke Ishizawa, Tokyo to Shinjuke ku (JP); and Katsumi Kishino, Akiruno (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP); and SOPHIA SCHOOL CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP); and SOPHIA SCHOOL CORPORATION, Tokyo (JP)
Filed on Jul. 30, 2021, as Appl. No. 17/389,359.
Claims priority of application No. 2020-129992 (JP), filed on Jul. 31, 2020.
Prior Publication US 2022/0037859 A1, Feb. 3, 2022
Int. Cl. H01S 5/11 (2021.01); G03B 21/20 (2006.01); H01S 5/20 (2006.01); H01S 5/343 (2006.01); H01S 5/34 (2006.01)
CPC H01S 5/343 (2013.01) [G03B 21/2033 (2013.01); H01S 5/11 (2021.01); H01S 5/2054 (2013.01); H01S 5/341 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A light emitting device comprising:
a substrate; and
a laminated structure provided to the substrate, and including a buffer layer and a plurality of columnar parts disposed on the buffer layer, wherein
the columnar part includes
a first semiconductor layer,
a second semiconductor layer different in conductivity type from the first semiconductor layer, and
a light emitting layer disposed between the first semiconductor layer and the second semiconductor layer,
the first semiconductor layer is disposed between the substrate and the light emitting layer,
between an end at the substrate side of the light emitting layer in a laminating direction of the first semiconductor layer and the light emitting layer, and an end at an opposite side to the substrate of the light emitting layer in the laminating direction, a largest diametrical size of the columnar part is defined as a first diametrical size,
the columnar part has a diametrical size no larger than the first diametrical size in an entire area between the end at the substrate side of the light emitting layer and an end at the substrate side of the first semiconductor layer in the laminating direction,
the columnar part has a diametrical size smaller than the first diametrical size in at least a part of the area between the end at the substrate side of the light emitting layer in the laminating direction and the end at the substrate side of the first semiconductor layer,
the columnar part has a diametrical size no larger than the first diametrical size in an entire area between the end at the opposite side to the substrate of the light emitting layer, and an end at an opposite side to the substrate of the second semiconductor layer in the laminating direction,
the columnar part has a diametrical size smaller than the first diametrical size in at least a part of the area between the end at the opposite side to the substrate of the light emitting layer in the laminating direction, and the end at the opposite side to the substrate of the second semiconductor layer, and
in the columnar parts adjacent to each other, one of the columnar parts and another of the columnar parts have direct contact with each other.