US 12,308,613 B2
Vertical-cavity surface-emitting laser (VCSEL) with cascaded active region
Yuri Berk, Kiryat Tivon (IL); Vladimir Iakovlev, Ecublens (CH); Tamir Sharkaz, Kfar Tavor (IL); and Elad Mentovich, Tel Aviv (IL)
Assigned to Mellanox Technologies, Ltd., Yokneam (IL)
Filed by Mellanox Technologies, Ltd., Yokneam (IL)
Filed on Jun. 20, 2023, as Appl. No. 18/211,710.
Application 18/211,710 is a continuation of application No. 17/247,401, filed on Dec. 10, 2020, granted, now 11,728,623.
Claims priority of provisional application 62/947,636, filed on Dec. 13, 2019.
Prior Publication US 2024/0136795 A1, Apr. 25, 2024
Prior Publication US 2024/0235160 A9, Jul. 11, 2024
Int. Cl. H01S 5/30 (2006.01); H01S 5/024 (2006.01); H01S 5/183 (2006.01); H01S 5/227 (2006.01); H01S 5/34 (2006.01); H01S 5/42 (2006.01)
CPC H01S 5/18347 (2013.01) [H01S 5/02461 (2013.01); H01S 5/18311 (2013.01); H01S 5/18377 (2013.01); H01S 5/2275 (2013.01); H01S 5/3095 (2013.01); H01S 5/3401 (2013.01); H01S 5/423 (2013.01)] 20 Claims
OG exemplary drawing
 
17. A vertical-cavity surface-emitting laser (VCSEL) comprising:
a substrate;
a mesa structure disposed on the substrate, the mesa structure defining an emission axis of the VCSEL, the mesa structure comprising:
a first reflector,
a second reflector, and
a cascaded active region structure disposed between the first reflector and the second reflector, wherein the cascaded active region structure comprises a plurality of cascaded active region layers disposed along the emission axis, wherein each of the cascaded active region layers comprises an active region, a tunnel junction aligned with the emission axis, and an oxide confinement layer on an opposite side of the tunnel junction along the emission axis with respect to the active region;
a first heat dissipation structure extending between the first reflector and the second reflector; and
a second heat dissipation structure extending between the substrate and the second reflector.