| CPC H01Q 1/38 (2013.01) [H01Q 1/002 (2013.01); H01Q 1/2283 (2013.01)] | 20 Claims |

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1. An electronic device comprising:
a first wafer including:
a first surface;
at least one trench extending into the first wafer along a first direction; and
a plurality of first regions surrounding the at least one trench, the plurality of first regions each having a first surface coplanar with the first surface and a second surface extending along the first direction;
a second wafer hybrid bonded to the first wafer, the second wafer including a plurality of second regions each on a respective one of the plurality of first regions, each second region having a third surface extending along the first direction that is separated, along a second direction transverse to the first direction, from the respective second surface; and
at least one enclosed space at the level of the trench of the first wafer.
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