US 12,308,324 B2
Overlay mark
Kuang-Chung Lee, Taichung (TW)
Assigned to Winbond Electronics Corp., Taichung (TW)
Filed by Winbond Electronics Corp., Taichung (TW)
Filed on May 20, 2022, as Appl. No. 17/749,140.
Prior Publication US 2023/0378082 A1, Nov. 23, 2023
Int. Cl. H01L 23/544 (2006.01); G03F 1/42 (2012.01)
CPC H01L 23/544 (2013.01) [G03F 1/42 (2013.01); H01L 2223/54426 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An overlay mark, comprising:
a first pattern comprising:
a plurality of first strip shapes extending along a first direction and arranged in parallel along a second direction; and
a plurality of first dot shapes respectively disposed between the plurality of first strip shapes; and
a second pattern comprising:
a plurality of second strip shapes extending along the second direction and arranged in parallel along the first direction; and
a plurality of second dot shapes respectively disposed between the plurality of second strip shapes,
wherein all of the first dot shapes between two adjacent first strip shapes are arranged in a column along the first direction, all of the second dot shapes between two adjacent second strip shapes are arranged in a row along the second direction, the first dot shapes in two adjacent columns are staggered with each other, and the second dot shapes in two adjacent rows are staggered with each other.