US 12,308,273 B2
Bonding apparatus and method for correcting movement amount of bonding head
Makoto Takahashi, Tokyo (JP); and Tomonori Nakamura, Tokyo (JP)
Assigned to SHINKAWA LTD., Tokyo (JP)
Appl. No. 17/603,943
Filed by SHINKAWA LTD., Tokyo (JP)
PCT Filed Apr. 14, 2020, PCT No. PCT/JP2020/016373
§ 371(c)(1), (2) Date Oct. 14, 2021,
PCT Pub. No. WO2020/213588, PCT Pub. Date Oct. 22, 2020.
Claims priority of application No. 2019-076779 (JP), filed on Apr. 15, 2019.
Prior Publication US 2022/0199448 A1, Jun. 23, 2022
Int. Cl. H01L 21/68 (2006.01); B25J 9/16 (2006.01); B25J 13/08 (2006.01); G06T 7/00 (2017.01); G06T 7/73 (2017.01); H01L 21/67 (2006.01); B25J 11/00 (2006.01)
CPC H01L 21/681 (2013.01) [B25J 9/1697 (2013.01); B25J 13/08 (2013.01); G06T 7/0004 (2013.01); G06T 7/73 (2017.01); H01L 21/67144 (2013.01); H01L 21/67259 (2013.01); B25J 11/0095 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30204 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A bonding apparatus, characterized in comprising:
a bonding head, on which a bonding nozzle configured to bond a semiconductor element adsorbed on a tip thereof onto a substrate or another semiconductor element is mounted, wherein the bonding head is configured to move in at least one direction;
a position detection camera, mounted on the bonding head and moving with movement of the bonding head;
a stage, configured to adsorb and fix the substrate on an upper surface, wherein the substrate moves on a first direction;
a reference mark, placed on an upper surface of a mark stand that is provided at a distance from the stage in a second direction, wherein the first direction and the second direction are directions orthogonal to each other in a horizontal plane; and
a control part configured to adjust a position of the bonding head,
wherein the control part is configured to perform mark correction at every prescribed timing and perform actual position correction at every other prescribed timing,
the mark correction comprises: imaging the reference mark using the position detection camera, correcting an amount of movement of the bonding head on the basis of an amount of positional deviation between a position of the imaged reference mark and a reference position of the position detection camera, and calculating a cumulative value of amounts of correction of the mark correction from previous actual position correction;
the other prescribed timing is a timing when the cumulative value of amounts of correction of the mark correction from the previous actual position correction exceeds a prescribed first threshold;
the actual position correction comprises: detecting an actual bonding position of the semiconductor element after bonding using the position detection camera and correcting the amount of movement of the bonding head on the basis of an amount of positional deviation between the detected actual bonding position of the semiconductor element and a target bonding position.