US 12,308,217 B2
Apparatus for preventing contamination of self-plasma chamber
Dong Ho Cha, Gyeonggi-do (KR)
Assigned to NANOTECH INC., Gyeonggi-do (KR)
Filed by NANOTECH INC., Gyeonggi-do (KR)
Filed on Apr. 12, 2024, as Appl. No. 18/634,508.
Application 18/634,508 is a division of application No. 16/646,408, granted, now 11,990,320, previously published as PCT/KR2018/008999, filed on Aug. 7, 2018.
Claims priority of application No. 10-2017-0117900 (KR), filed on Sep. 14, 2017.
Prior Publication US 2024/0258077 A1, Aug. 1, 2024
Int. Cl. H01J 37/32 (2006.01); C23C 16/50 (2006.01)
CPC H01J 37/32504 (2013.01) [C23C 16/50 (2013.01); H01J 37/32183 (2013.01); H01J 37/32568 (2013.01); H01J 37/32651 (2013.01); H01J 37/32834 (2013.01); H01J 2237/022 (2013.01); H01J 2237/026 (2013.01); H01J 2237/332 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An apparatus comprising a self-plasma chamber comprising a shielding means, wherein the self-plasma chamber is connected to a branch pipe branching from an exhaust pipe of a process chamber to analyze components of gas generated from the process chamber,
wherein the shielding means prevents ground-electrode material, generated due to a sputtering phenomenon when a positive charge of the plasma generated from the self-plasma chamber collides with a ground electrode connector, from being introduced into a discharge chamber,
wherein the self-plasma chamber comprises:
the ground electrode connector connected to the branch pipe,
a flange formed on a one end of the ground electrode connector which is connected to the branch pipe, and
the discharge chamber connected to an other end of the ground electrode connector and made of non-metallic material, wherein the one end of the ground electrode connector is opposite to the other end of the ground electrode connector,
wherein the discharge chamber comprises:
a discharge area connected to the other end of the ground electrode connector;
a main discharge chamber extending from the discharge area, having an outer diameter smaller than an outer diameter of the discharge area, with a stepped portion being formed on an end of the discharge area connected to the main discharge chamber, and
wherein the shielding means is installed in the discharge area.