US 12,308,210 B2
Active switch on time control for bias supply
Maneesh Kumar Singh, Fort Collins, CO (US); and Hien Minh Nguyen, Longmont, CO (US)
Assigned to Advanced Energy Industries, Inc., Denver, CO (US)
Filed by Advanced Energy Industries, Inc., Denver, CO (US)
Filed on Jun. 13, 2024, as Appl. No. 18/742,088.
Application 18/742,088 is a continuation of application No. 17/584,992, filed on Jan. 26, 2022, granted, now 12,046,448.
Prior Publication US 2025/0022683 A1, Jan. 16, 2025
This patent is subject to a terminal disclaimer.
Int. Cl. H02M 7/537 (2006.01); H01J 37/32 (2006.01); H02M 1/08 (2006.01); H02M 3/155 (2006.01); H02M 7/5395 (2006.01)
CPC H01J 37/32146 (2013.01) [H02M 1/08 (2013.01); H02M 3/155 (2013.01); H02M 7/537 (2013.01); H02M 7/5395 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A bias supply to apply a periodic voltage comprising:
a switch network and at least one power supply configured, in combination, to apply an asymmetric periodic voltage waveform and a current waveform;
a timing parameter estimator configured to generate a pulse width control signal based on a first crossing time that the current waveform crosses a threshold current value after falling from a positive peak current value; and
a gate drive signal generator configured to, responsive to the pulse width control signal received from the timing parameter estimator, provide a gate drive signal to at least one switch of the switch network to control application of the asymmetric periodic voltage waveform.