US 12,307,650 B2
Scanning electron microscope device, semiconductor manufacturing device, and method of controlling semiconductor manufacturing device
Yunje Cho, Seoul (KR); Subong Shon, Suwon-si (KR); Myungjun Lee, Seongnam-si (KR); Taehyoung Lee, Suwon-si (KR); and Yeny Yim, Seoul (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on May 27, 2022, as Appl. No. 17/826,320.
Claims priority of application No. 10-2021-0119819 (KR), filed on Sep. 8, 2021.
Prior Publication US 2023/0074302 A1, Mar. 9, 2023
Int. Cl. G06T 7/73 (2017.01); G06T 1/20 (2006.01); G06T 7/00 (2017.01); G06V 10/77 (2022.01)
CPC G06T 7/0006 (2013.01) [G06T 1/20 (2013.01); G06T 7/73 (2017.01); G06V 10/7715 (2022.01); G06T 2207/10061 (2013.01); G06T 2207/10148 (2013.01); G06T 2207/30148 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A scanning electron microscope (SEM) device comprising:
an electron beam source configured to emit an electron beam;
a lens unit disposed between the electron beam source and a stage, the stage configured to seat an object including structures having a pattern, the lens unit including a scanning coil configured to generate an electromagnetic field to provide a lens, and the lens unit including an astigmatism adjuster having a plurality of stigmators surrounding the electron beam; and
a controller including processing circuitry configured to
change a working distance between the lens unit and the object to obtain a plurality of original images,
obtain a pattern image, in which the structures appear, and a plurality of kernel images, in which a distribution of the electron beam on the object appears, from the plurality of original images, and
control, based on feature values extracted from the plurality of kernel images, the astigmatism adjuster to,
adjust a focus of the lens unit by setting the working distance, and
adjust an astigmatism of the lens unit by setting currents applied to the plurality of stigmators
wherein the controller is configured to,
map the feature values extracted from the plurality of kernel images to a single two-dimensional plane;
determine a compensation data for controlling the astigmatism adjuster to adjust the astigmatism of the lens unit with reference to a representative vector of vectors connecting some of the feature values to each other; and
determine the working distance of the lens unit using a feature value closest to an origin of the two-dimensional plane among the feature values.