US 12,306,550 B2
Inner pod holding device conducive to reducing dust contamination and optical inspection apparatus for inner pod
Yin-Feng Chan, New Taipei (TW); Lin-Hsin Tu, New Taipei (TW); and Ming-Mo Lo, New Taipei (TW)
Assigned to GUDENG EQUIPMENT CO., LTD., New Taipei (TW)
Filed by GUDENG EQUIPMENT CO., LTD., New Taipei (TW)
Filed on May 23, 2023, as Appl. No. 18/321,799.
Claims priority of application No. 112112233 (TW), filed on Mar. 30, 2023.
Prior Publication US 2024/0329544 A1, Oct. 3, 2024
Int. Cl. G03F 7/00 (2006.01); G01N 21/94 (2006.01); G03F 1/66 (2012.01)
CPC G03F 7/70741 (2013.01) [G01N 21/94 (2013.01); G03F 1/66 (2013.01); G03F 7/70758 (2013.01); G03F 7/7085 (2013.01); G03F 7/70916 (2013.01)] 5 Claims
OG exemplary drawing
 
1. An inner pod holding device conducive to reducing dust contamination, comprising:
a separator for defining a concealing space and a holding space;
a plurality of supporters being disposed in the holding space and each having a bottom portion and a top portion, the bottom portions being connected to the separator, and the top portions being coplanar;
a first positioning module comprising a first driving member and at least one first positioning member, the first driving member being disposed in the concealing space and configured to move in a first direction, wherein the at least one first positioning member has a bottom portion connecting to the first driving member and a top portion protruding to the holding space; and
a second positioning module comprising a second driving member and at least one second positioning member, the second driving member being disposed in the concealing space and configured to move in a second direction, wherein the at least one second positioning member has a bottom portion connecting to the second driving member and a top portion protruding to the holding space;
wherein a coplanar plane defined by the first direction and the second direction is parallel to the coplanar plane defined by the top portions of the plurality of supporters.