US 12,306,549 B2
Photo mask stage unit and photo mask stocker including the same
Yun Ho Choi, Osan-si (KR); and Seung Won Kim, Yongin-si (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-Do (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Dec. 27, 2022, as Appl. No. 18/146,714.
Claims priority of application No. 10-2021-0189025 (KR), filed on Dec. 27, 2021; and application No. 10-2022-0058036 (KR), filed on May 11, 2022.
Prior Publication US 2023/0205098 A1, Jun. 29, 2023
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/70733 (2013.01) 20 Claims
OG exemplary drawing
 
1. A photo mask stage unit performing alignment on a photo mask, the photo mask stage unit comprising:
an aligning member for aligning the photo mask so that the photo mask is positioned in a proper position; and
guide members for supporting edges of the photo mask and guiding the photo mask to the proper position,
wherein the aligning member pushes the photo mask in a diagonal direction and
wherein the guide members include,
a first guide member for supporting a first corner portion where a first side surface and a second side surface of the photo mask meet, and
a second guide member positioned diagonally from the first corner portion and supporting a second corner portion where a third side surface and a fourth side surface of the photo mask meet, the second guide member including a first reverse movement prevention surface for supporting a third bottom corner where a bottom surface and the third side surface of the photo mask meet, and inclined upward in an outward direction away from the photo mask, the first reverse movement prevention surface inclined upward in an outward direction extending to a top surface of the second guide member.